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Rechargeable thin-film lithium batteries

โœ Scribed by J.B. Bates; G.R. Gruzalski; N.J. Dudney; C.F. Luck; Xiaohua Yu

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
726 KB
Volume
70-71
Category
Article
ISSN
0167-2738

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Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r