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Recent developments in dimensional metrology for microsystem components

✍ Scribed by S. Cao; U. Brand; T. Kleine-Besten; W. Hoffmann; H. Schwenke; S. Bütefisch; S. Büttgenbach


Book ID
106184472
Publisher
Springer-Verlag
Year
2002
Tongue
English
Weight
115 KB
Volume
8
Category
Article
ISSN
0946-7076

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