Recent advances in X-ray nanolithography using synchrotron radiation at Super-ACO

✍ Scribed by F Rousseaux; Y Chen; A.M Haghiri-Gosnet; H Launois

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 560 KB
• Volume: 359
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/0168-9002(94)01357-8