A site-specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. A focused ion beam was used to slice an electron transparent membrane from a specific area of interest within a bulk sample. Micromanipulation lift-out procedures we
✦ LIBER ✦
Recent advances in FIB–TEM specimen preparation techniques
✍ Scribed by Jian Li; T. Malis; S. Dionne
- Book ID
- 113779939
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 398 KB
- Volume
- 57
- Category
- Article
- ISSN
- 1044-5803
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In semiconductor industries the detection of process deviations (especially in the first phase of the manufacturing) has become mandatory before the final electrical testing. The aim of this work is to demonstrate that it is possible to use a Dual Beam (BD) system to provide detailed feedback at cri