Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer

✍ Scribed by T. Tsuru; T. Tsutou; M. Yamamoto

• Book ID: 113936801
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 220 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2004.02.012