✦ LIBER ✦
In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics
✍ Scribed by T. Tsuru; M. Yamamoto
- Book ID
- 108289436
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 440 KB
- Volume
- 515
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.