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Realization of ultrasmooth surface with atomic scale step structure on LiNbO3 and LiTaO3 substrates

✍ Scribed by G. Lee


Book ID
115403535
Publisher
Optical Society of America
Year
2002
Tongue
English
Weight
182 KB
Volume
10
Category
Article
ISSN
1094-4087

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## Abstract 250 nm thick AlN layers without a nucleation layer were grown directly on 6H‐SiC(0001) with 3‐bilayer‐height steps by rf‐plasma‐assisted molecular‐beam epitaxy. The structure and morphology of the AlN layers have been studied using atomic force microscopy, X‐ray diffraction and transmis