Effects of ion implantation on surface c
โ
Shao Tianhao; Jiang Xinyuan; Shang Wei; Feng Xiqi
๐
Article
๐
1991
๐
Elsevier Science
๐
English
โ 392 KB
Implantations of Xe +, Ar + and N + ions at room temperature cause radiation damage, volume expansion and near-surface decomposition in LiNbO 3. Precipitates of Li20 are formed in surface regions when exposed to the atmosphere. Amorphization induced by heavy damage is observed in the ionimplanted re