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Realization and characterization of nano-scale FinFET devices

✍ Scribed by J. Kretz; L. Dreeskornfeld; R. Schröter; E. Landgraf; F. Hofmann; W. Rösner

Book ID: 113797693
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 286 KB
Volume: 73-74
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.03.055

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