β Scribed by Peverini, L. ;Kozhevnikov, I. ;Ziegler, E.
No coin nor oath required. For personal study only.
An apparatus and a characterization technique have been developed at the ESRF beamline BM5 to investigate inβsitu the evolution of the morphology of a film using grazing incidence Xβray reflectometry. The instrument is capable of measuring inβsitu and in real time the Xβray intensity specularly and diffusely scattered from a rough thin film during various surfacing processes. The variation of the specular intensity as a function of the processing time, recorded simultaneously with each Xβray scattering diagram, is analyzed to infer the film growth rate, the film density and the variation of roughness conformity during surface processing.
The potential of the method is demonstrated for two particular cases: thin film deposition by magnetron sputtering and subsequent film etching by low energy ion bombardment. The paper describes some recent achievements and present examples of onβline diagnostics for which real time inβsitu Xβrays reflectometry proves to be a unique probe. (Β© 2007 WILEYβVCH Verlag GmbH & Co. KGaA, Weinheim)
π SIMILAR VOLUMES
The techniques of X-ray and neutron reflectometry are compared with respect to their application for the investigation of polymeric thin films. While the use of X-ray reflectometry is limited due to the small contrast between most polymers, deuteration offers many possibilities for neutron reflectom
The dry-cast membrane-formation process is a principal technique by which asymmetric porous membranes as well as dense films can be obtained. Much insight into the fundamental nature of this process can be obtained via real-time measurements of mass and thickness changes. The former requires an equa