Real-time volumetric growth rate measurements and feedback control of three-dimensional laser chemical vapor deposition

✍ Scribed by J.L. Maxwell; J. Pegna; D.V. Messia

• Book ID: 106023378
• Publisher: Springer
• Year: 1998
• Tongue: English
• Weight: 1004 KB
• Volume: 67
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390050778