✦ LIBER ✦
State estimation approach for determining composition and growth rate of Si_1-xGe_x chemical vapor deposition utilizing real-time ellipsometric measurements
✍ Scribed by Middlebrooks, Scott A. ;Rawlings, James B.
- Book ID
- 115353112
- Publisher
- The Optical Society
- Year
- 2006
- Tongue
- English
- Weight
- 297 KB
- Volume
- 45
- Category
- Article
- ISSN
- 1559-128X
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