Real-time monitoring of synchrotron-radiation-excited Si homoepitaxy on Si(100) by spectroscopic ellipsometry

✍ Scribed by H Akazawa

• Book ID: 114086350
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 178 KB
• Volume: 313-314
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(97)00859-6