Real time observation of initial thermal oxidation using O2 gas on Si(0 0 1) surface by means of synchrotron radiation Si-2p photoemission spectroscopy

✍ Scribed by Akitaka Yoshigoe; Kousuke Moritani; Yuden Teraoka

• Book ID: 108418101
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 165 KB
• Volume: 216
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(03)00451-3