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Real time monitoring of growth and p-type doping processes in MOVPE of ZnSe

✍ Scribed by M. Miyachi; Y. Ohira; S. Komatsu; M. Kurihara; N. Shimoyama; M. Kobayashi; Y. Kato; A. Yoshikawa


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
353 KB
Volume
159
Category
Article
ISSN
0022-0248

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In-line and real-time process monitoring
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The aim of the present study was to examine the complementary properties of Raman and near infrared (NIR) spectroscopy as PAT tools for the fast, noninvasive, nondestructive and in-line process monitoring of a freeze drying process. Therefore, Raman and NIR probes were built in the freeze dryer cham