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Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films

✍ Scribed by Le Priol, A.; Simonot, L.; Abadias, G.; Guérin, P.; Renault, P.-O.; Le Bourhis, E.


Book ID
122027778
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
550 KB
Volume
237
Category
Article
ISSN
0257-8972

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