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Real time 2 dimensional detector for charged particle and soft X-ray images

✍ Scribed by Masayoshi Ishikawa; Michihiro Ito; Tetsuro Endo; Koichiro Oba

Book ID
107922915
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
319 KB
Volume
363
Category
Article
ISSN
0168-9002

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## Abstract We describe a rapid digital system for X‐ray diffraction imaging and demonstrate its application to the real‐time identification of edge defects in a silicon wafer that had been subjected to rapid thermal annealing. The application of the system to the __in situ__ study of slip nucleati