Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry

✍ Scribed by Wehrmeister, Jana; Fuß, Achim; Saurenbach, Frank; Berger, Rüdiger; Helm, Mark

• Book ID: 121840847
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 721 KB
• Volume: 78
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.2785028