Read-out of micromechanical cantilever sensors by phase shifting interferometry

✍ Scribed by Helm, M.; Servant, J. J.; Saurenbach, F.; Berger, R.

• Book ID: 120511458
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 430 KB
• Volume: 87
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2008358