Reactively sputtered ZrNx barrier films between Au and SiO2: surface and interface analysis

✍ Scribed by N. Popović; M. Milić; T. Nenadović; Ž. Bogdanov; B. Goncić; M. Zlatanović

• Book ID: 103616915
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 605 KB
• Volume: 70-71
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90566-t