Effects of substrate bias and nitrogen flow ratio on the surface morphology and binding state of reactively sputtered ZrNx films before and after annealing

✍ Scribed by J.S. Jeng; J.S. Chen

• Book ID: 108064015
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 837 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.05.097