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Reactive sticking coefficient of silane on the Si(111)-(7×7) Surface

✍ Scribed by S.M. Gates; C.M. Greenlief; D.B. Beach; R.R. Kunz

Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
544 KB
Volume
154
Category
Article
ISSN
0009-2614

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