𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Reactive sputtering of thin films and investigation of their properties

✍ Scribed by K Reichelt

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
50 KB
Volume
34
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Electrical and structural properties of
Electrical and structural properties of zirconia thin films prepared by reactive magnetron sputtering
✍ K.P.S.S. Hembram; Gargi Dutta; Umesh V. Waghmare; G. Mohan Rao πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 819 KB

Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp