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Reactive sputtered Ta2O5 antireflection coatings

✍ Scribed by F. Rubio; J. Dennis; J.M. Albella; J.M. Martinez-Duart

Publisher: Elsevier Science
Year: 1983
Weight: 299 KB
Volume: 8
Category: Article
ISSN: 0379-6787
DOI: 10.1016/0379-6787(83)90065-0

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✦ Synopsis

Ta2Os antireflection coatings were prepared by reactive sputtering from a tantalum target in a magnetron system. The optical constants of the films were determined from reflectance and transmittance spectra in the 0.25-2.5 #m wavelength interval. The refractive index was close to 2.0 in the visible region, resulting in optimum impedance matching for silicon solar cells. The sputtered Ta2Os films showed an absorption coefficient smaller than about 103 cm -1 for photon energies below 4 eV. Finally, sputtered Ta2Os antireflection coatings were tested on silicon solar cells and were found to increase the efficiency of the cells from 9.5% to 12.9%.

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