Reactive pulse plasma crystallization of TiN layers on substrates at 500 K

✍ Scribed by A. Michalski; Z. Romanowski

• Book ID: 107789493
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 784 KB
• Volume: 61
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(83)90197-5