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Reactive ion etching (RIE) as a method for texturing polycrystalline silicon solar cells

โœ Scribed by S. Winderbaum; O. Reinhold; F. Yun


Book ID
108472551
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
470 KB
Volume
46
Category
Article
ISSN
0927-0248

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PolycrystaUine silicon (Wacker-SILSO) solar cells have been made by phosphorus implantation in combination with pulsed excimer laser annealing or thermal annealing. It was found that laser annealing yields cells with a short-circuit current which is 3% -4% higher than that obtained by thermal anneal