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Reactive ion etching of Nb/A1Ox/Nb for Josephson technology

✍ Scribed by C.-K. Hu; N. Mazzeo; S.J. Wind; D.J. Pearson; M.B. Ketchen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive ion etching of Nb thin films fo

✍ K. Popova; W.F. Lea; D. Hutson; J.P. Sydow; C.M. Pegrum 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 570 KB

Trilevel reactive ion etching processes

📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 112 KB