Reactive co-sputtering of oxides and nitrides using a C-Magtm rotatable cylindrical cathode

✍ Scribed by A. Belkind; W. Gerristead; Z. Orban; D. Dow; J. Felts; R. Laird

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 573 KB
• Volume: 49
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(91)90048-2