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Reactions of laser-generated CF2 on silicon and silicon oxide surfaces

✍ Scribed by J.G. Langan; J.A. Shorter; Xu Xin; S.A. Joyce; J.I. Steinfeld

Book ID: 118362631
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 613 KB
Volume: 207
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(89)90127-1

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