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Reactions of atomic hydrogen in the deposition of hydrogenated amorphous silicon by glow discharge and reactive sputtering: F J Kampas,J Appl Phys, 53 (9), 1982, 6408–6412

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 175 KB
Volume: 35
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(85)90159-9

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