✦ LIBER ✦
Defects in hydrogenated amorphous silicon-carbon alloy films prepared by glow discharge decomposition and sputtering: A Morimoto et al, J Appl Phys, 53 (11), 1982, 7299–7305
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 144 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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