Reaction mechanisms for the photon-enhanced etching of semiconductors: An investigation of the UV-stimulated interaction of chlorine with Si(100)

✍ Scribed by R.B. Jackman; H. Ebert; J.S. Foord

• Book ID: 118986846
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 566 KB
• Volume: 176
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(86)90171-8