RBS and SIMS characterization of tungsten silicide deposited by using dichlorosilane and tungsten hexafluoride

✍ Scribed by Richard B. Gregory; Bruce C. Lamartine; T. H. Tom Wu; Harland G. Tompkins

• Publisher: John Wiley and Sons
• Year: 1989
• Tongue: English
• Weight: 478 KB
• Volume: 14
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740140105