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Rate constants for the etching of gallium arsenide by atomic chlorine

✍ Scribed by Jae H. Hat; Elmer A. Ogryzlo

Publisher: Springer
Year: 1991
Tongue: English
Weight: 386 KB
Volume: 11
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf01447249

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