Nitridation of TiSi2 thin films by rapid
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J. PΓ©rez-Rigueiro; C. Jimenez; L. VΓ‘zquez; R. PΓ©rez-Casero; J.M. MartΓnez-Duart
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Article
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1996
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Elsevier Science
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English
β 515 KB