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Rapid thermal annealing of arsenic, beryllium and zinc dual implanted AlGaAs

✍ Scribed by Pin Ho; Yun Chung; Verle W. Aebi

Book ID: 113278804
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 156 KB
Volume: 21
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(87)90910-4

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