Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology

✍ Scribed by K. Kim; S. Park; J.-B. Lee; H. Manohara; Y. Desta; M. Murphy; C. H. Ahn

• Publisher: Springer-Verlag
• Year: 2002
• Tongue: English
• Weight: 273 KB
• Volume: 9
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-002-0194-6