This paper describes the deposition of high-quality zinc oxide (ZnO) thin film by reactive dc target-facing-type sputtering (DC-TFTS) using an arc killer that periodically applies a positive pulse to the negative dc discharge current. High-speed deposition of high-quality thin film, which is a merit
Rapid method for preparing polymeric piezoelectric films
β Scribed by Leon M. Adams; H. S. Silvus Jr.
- Publisher
- John Wiley and Sons
- Year
- 1980
- Tongue
- English
- Weight
- 157 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0021-8995
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