✦ LIBER ✦

Rapid electron-beam isothermal processing of arsenic-implanted NMOS devices

✍ Scribed by McMahon, R.A.; Ahmed, H.; Godfrey, D.; Yallup, K.J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Rapid isothermal processing with electro

✍ Yallup, K.J.; Godfrey, D.J.; McMahon, R.A.; Ahmed, H. 📂 Article 📅 1987 🏛 IEEE 🌐 English ⚖ 601 KB

Sublimation and diffusion of arsenic imp

✍ R. Grötzschel; V.A. Kagadey; N.I. Lebedeva; D.I. Proskurovsky 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 281 KB

Rapid isothermal processing for fabricat

✍ Pearton, S.J.; Ren, F.; Katz, A.; Fullowan, T.R.; Abernathy, C.R.; Hobson, W.S.; 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 579 KB