Rapid determination of surface roughness of polycrystalline silicon following frontside and backside excimer laser irradiation

✍ Scribed by Chil-Chyuan Kuo

• Book ID: 118803563
• Publisher: Springer US
• Year: 2012
• Tongue: English
• Weight: 958 KB
• Volume: 33
• Category: Article
• ISSN: 1573-8760
• DOI: 10.1007/s10946-012-9303-x