Rapid bending of a nonliquid crystal azobenzene polymer film and characteristics of surface relief grating

Patterning of Substrates Using Surface R

Patterning of Substrates Using Surface Relief Structures on an Azobenzene-Functionalized Polymer Film

✍ S. Yang; K. Yang; L. Niu; R. Nagarajan; S. Bian; A. K. Jain; J. Kumar 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 191 KB 👁 2 views

**A maskless method for patterning substrates** using surface relief structures on azobenzene‐functionalized polymer is demonstrated. Surface relief structures are inscribed on a polymer film spin‐coated on an indium tin oxide (ITO) substrate by exposure to an interference pattern. Etching with oxyg