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Range profiles of medium and heavy ions implanted into SiO2

✍ Scribed by P.L. Grande; P.F.P. Fichtner; M. Behar; F.C. Zawislak


Book ID
113278903
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
486 KB
Volume
35
Category
Article
ISSN
0168-583X

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