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Raman Spectroscopy Investigation of Silicon Nanocrystals Formation in Silicon Nitride Films

✍ Scribed by Volodin, V.A.; Efremov, M.D.; Gritsenko, V.A.

Book ID: 121330099
Publisher: Trans Tech Publications, Ltd.
Year: 1997
Tongue: English
Weight: 425 KB
Volume: 57-58
Category: Article
ISSN: 1662-9779
DOI: 10.4028/www.scientific.net/SSP.57-58.501

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