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Raman Microprobe Evaluation of Bridging Stresses in Highly Anisotropic Silicon Nitride

✍ Scribed by Giuseppe Pezzotti; Hiroyuki Ichimaru; Luca Paolo Ferroni; Kiyoshi Hirao; Orfeo Sbaizero

Book ID: 110828666
Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 427 KB
Volume: 84
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.2001.tb00915.x

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