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Raman characterization of diamond and carbon films grown by remote microwave plasma enhanced CVD

โœ Scribed by Mermoux, M.; Roy, F.; Marcus, B.; Abello, L.; Lucazeau, G.

Book ID
123111110
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
582 KB
Volume
1
Category
Article
ISSN
0925-9635

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๐Ÿ“œ SIMILAR VOLUMES

Structural and mechanical characterizati
Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD
โœ Sambita Sahoo; Swati S. Pradhan; Venkateswarlu Bhavanasi; S.K. Pradhan ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 899 KB

Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee