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Radio frequency plasma sputter type heavy negative ion source

โœ Scribed by Junzo Ishikawa; Hiroshi Tsuji; Yukio Okada; Masanobu Shinoda; Yasuhito Gotoh


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
497 KB
Volume
44
Category
Article
ISSN
0042-207X

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