New methods of enhancing ion beam intensities from two types of sputter negative ion sources

✍ Scribed by Du Guangtian

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 255 KB
• Volume: 274
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/0168-9002(89)90168-x