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Radiation-induced protective carbon coating for extreme ultraviolet optics

โœ Scribed by Klebanoff, L. E.; Clift, W. M.; Malinowski, M. E.; Steinhaus, C.; Grunow, P.; Bajt, S.


Book ID
121740109
Publisher
AVS (American Vacuum Society)
Year
2002
Tongue
English
Weight
391 KB
Volume
20
Category
Article
ISSN
0734-211X

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