𝔖 Bobbio Scriptorium

✦ LIBER ✦

Radiation damage processes affecting electron beam lithography of inorganic materials

✍ Scribed by Douglas L. Medlin; David G. Howitt

Book ID: 112188327
Publisher: Hindawi Limited
Year: 1992
Tongue: English
Weight: 509 KB
Volume: 14
Category: Article
ISSN: 0161-0457
DOI: 10.1002/sca.4950140205

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE SPIE 31st Interna

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Metrology, Inspection, and Process Control for Microlithography XX - Evaluation of damage induced by electron beam irradiation to MOS gate pattern and method for damage-free inspection

✍ Matsui, Miyako; Machida, Syuntaro; Mine, Toshiyuki; Hozawa, Kazuyuki; Watanabe, 📂 Article 📅 2006 🏛 SPIE ⚖ 485 KB