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Radiation damage in He implanted silicon at high temperature using multi-energies

✍ Scribed by M.L David; A Ratchenkova; E Oliviero; M.F Denanot; M.F Beaufort; A Declémy; C Blanchard; N.N Gerasimenko; J.F Barbot


Book ID
114166278
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
381 KB
Volume
198
Category
Article
ISSN
0168-583X

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